Non-contact end effector
Wafer cassette loader/unloader non-contact robotic hand
The "non-contact end effector" generates negative pressure through the Bernoulli effect by ejecting gas, allowing the wafer to be suspended in a non-contact state in mid-air. This hand is designed to be slim, making it ideal for loading and unloading wafers onto carriers. It is equipped with an exhaust recovery device (patented), allowing it to be used in clean rooms. Additionally, it has a positioning mechanism, enabling the transport of aligned wafers.
- 企業：ソーラーリサーチ研究所 大阪事業所
- 価格：Other
